JPH0418612B2 - - Google Patents
Info
- Publication number
- JPH0418612B2 JPH0418612B2 JP6315984A JP6315984A JPH0418612B2 JP H0418612 B2 JPH0418612 B2 JP H0418612B2 JP 6315984 A JP6315984 A JP 6315984A JP 6315984 A JP6315984 A JP 6315984A JP H0418612 B2 JPH0418612 B2 JP H0418612B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- receiving element
- pressure
- emitting element
- sensitive sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000011521 glass Substances 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6315984A JPS60209129A (ja) | 1984-04-02 | 1984-04-02 | 感圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6315984A JPS60209129A (ja) | 1984-04-02 | 1984-04-02 | 感圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60209129A JPS60209129A (ja) | 1985-10-21 |
| JPH0418612B2 true JPH0418612B2 (en]) | 1992-03-27 |
Family
ID=13221174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6315984A Granted JPS60209129A (ja) | 1984-04-02 | 1984-04-02 | 感圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60209129A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0421831U (en]) * | 1990-06-11 | 1992-02-24 |
-
1984
- 1984-04-02 JP JP6315984A patent/JPS60209129A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60209129A (ja) | 1985-10-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4447118A (en) | Optical information transfer system | |
| US4912316A (en) | Detecting apparatus with resinous body | |
| JP7036236B2 (ja) | 触覚及び近接センサ | |
| JPH0426413B2 (en]) | ||
| JPH0418612B2 (en]) | ||
| JP3828755B2 (ja) | 変位光量変換装置 | |
| JPS6141938A (ja) | 二次元感圧センサ | |
| JPH0475452B2 (en]) | ||
| JPH0627675B2 (ja) | 二次元感圧センサ | |
| EP0464849A2 (en) | Displacement sensor and positioner | |
| US5686723A (en) | Light sensing detector assembly with integral fiber optic light transmission elements | |
| JPH0316050B2 (en]) | ||
| JP2003106871A (ja) | 発光ユニット、発光受光ユニットおよび光学式変位検出装置 | |
| JPS63217222A (ja) | 光電式変位検出装置 | |
| JPH11295167A (ja) | 触覚センサ | |
| JPS63240082A (ja) | ホトインタラプタ | |
| JPS60149937A (ja) | 圧力測定装置 | |
| JPH02306210A (ja) | リモートセンシング用自動焦点調整装置 | |
| JP3255762B2 (ja) | 完全密着型イメージセンサユニット | |
| JPS6076634A (ja) | 二次元感圧センサ | |
| JPH03201488A (ja) | 光学素子 | |
| JPH0618216A (ja) | 触覚センサ | |
| JPH0317210Y2 (en]) | ||
| JPS61255302A (ja) | 光学装置 | |
| JPS61135272A (ja) | リニアイメ−ジセンサ |